Design and simulation of an optical waveguide for its integration with a light source based on SRO

J. Alarcón-Salazar; I. E. Zaldívar-Huerta; M. Aceves-Mijares

doi:10.1117/12.2037153

7 March 2014 Design and simulation of an optical waveguide for its integration with a light source based on SRO

J. Alarcón-Salazar, I. E. Zaldívar-Huerta, M. Aceves-Mijares

Author Affiliations +

Proceedings Volume 8980, Physics and Simulation of Optoelectronic Devices XXII; 89801T (2014) https://doi.org/10.1117/12.2037153
Event: SPIE OPTO, 2014, San Francisco, California, United States

Abstract

The aim of this paper is to describe the design and simulation of an optical waveguide for its potential integration with an optical source based on silicon rich oxide (SRO), on a silicon substrate. SRO deposited by Low Pressure Chemical Vapor Deposition (LPCVD) has emission of light in the visible range, and then our goal is to integrate this optical source with an appropriate optical waveguide. In this sense, we describe the methodology followed for the design of the optical waveguide able to transmit light emitted in the wavelength range from 400 to 800 nm. Due to its optical properties and compatibility with silicon technology the core material selected for the waveguide is silicon nitride (Si₃N₄), surrounded by silicon oxide (SiO₂). The optimal dimensions and geometry that reduces losses and confine the light into the core zone are obtained by simulation.

Citation Download Citation

J. Alarcón-Salazar, I. E. Zaldívar-Huerta, and M. Aceves-Mijares "Design and simulation of an optical waveguide for its integration with a light source based on SRO", Proc. SPIE 8980, Physics and Simulation of Optoelectronic Devices XXII, 89801T (7 March 2014); https://doi.org/10.1117/12.2037153

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE