Full-field step profile measurement with sinusoidal wavelength scanning interferometer

Samuel Choi; Osami Sasaki; Takamasa Suzuki

doi:10.1117/12.2053539

28 May 2014 Full-field step profile measurement with sinusoidal wavelength scanning interferometer

Samuel Choi, Osami Sasaki, Takamasa Suzuki

Author Affiliations +

Proceedings Volume 9110, Dimensional Optical Metrology and Inspection for Practical Applications III; 91100F (2014) https://doi.org/10.1117/12.2053539
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

A sinusoidal wavelength scanning interferometer is proposed for 3-D profile measurement. The interference phase-shift signal generated by the sinusoidal wavelength scanning contains information of optical path difference (OPD) covering nm-mm scale structure. The interference phase-shift signal was obtained by the four-step phase shifting method. The sinusoidal wavelength shifting bandwidth of 5.7 nm with a frequency of approximately 180 Hz was performed by the Littman-Metcalf external resonator-type tunable laser with a center of 772.1 nm. The full-field step-height surface profile measurement and 3-D surface measurement were conducted by a CCD image sensor with an accuracy of few tens nm. The surface profile of gauge blocks with a step-height of up to 10 μm was successfully measured.

Citation Download Citation

Samuel Choi, Osami Sasaki, and Takamasa Suzuki "Full-field step profile measurement with sinusoidal wavelength scanning interferometer", Proc. SPIE 9110, Dimensional Optical Metrology and Inspection for Practical Applications III, 91100F (28 May 2014); https://doi.org/10.1117/12.2053539

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