Deposition condition influence on optical properties of indium tin oxide

Taras O. Hanulia; Olga Lopatynska; Vasyl V. Lendel; Leonid V. Poperenko

doi:10.1117/12.2061185

27 August 2014 Deposition condition influence on optical properties of indium tin oxide

Taras O. Hanulia, Olga Lopatynska, Vasyl V. Lendel, Leonid V. Poperenko

Proceedings Volume 9172, Nanostructured Thin Films VII; 917211 (2014) https://doi.org/10.1117/12.2061185
Event: SPIE NanoScience + Engineering, 2014, San Diego, California, United States

Abstract

Indium tin oxide (ITO) is a solid solution of indium (III) oxide (In₂O₃) and tin (IV) oxide (SnO₂). It is a typical object for research in modern optoelectronics. This material combines high transparency (in the visible) and conductivity simultaneously. It is used in the production of transparent electrodes of liquid crystal screens and solar cells. The optical properties of thin films of ITO were investigated using ellipsometry. Optical constants of these films were calculated using obtained ellipsometric parameters. Films thicknesses are equal to 21-34 nm, and their refractive indices vary in interval of 2,05-2,12. Also, it was found out how the deposition conditions of ITO films influences their optical properties.

Citation Download Citation

Taras O. Hanulia, Olga Lopatynska, Vasyl V. Lendel, and Leonid V. Poperenko "Deposition condition influence on optical properties of indium tin oxide", Proc. SPIE 9172, Nanostructured Thin Films VII, 917211 (27 August 2014); https://doi.org/10.1117/12.2061185

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