Stability of the micromachined membrane deformable mirror as a freeform optical element

Gleb Vdovin; Oleg Soloviev; Seva Patlan

doi:10.1117/12.2063243

12 September 2014 Stability of the micromachined membrane deformable mirror as a freeform optical element

Gleb Vdovin, Oleg Soloviev, Seva Patlan

Proceedings Volume 9193, Novel Optical Systems Design and Optimization XVII; 91930L (2014) https://doi.org/10.1117/12.2063243
Event: SPIE Optical Engineering + Applications, 2014, San Diego, California, United States

Abstract

Micromachined membrane deformable mirror (MMDM) can serve as an ad hoc" free-form optical element. To test the repeatability and stability of the standard MMDM, we have conducted the test of surface figure during multiple thermal cycling, test of figure drift at elevated temperatures, and a long-term 16-day stability test of actively formed mirror figure. The average rms error did not exceed λ =25 at λ = 633 nm, after repeated cycling from -14 to +70 C, with return to the room temperature. The existing design provides ~10° stability in the temperature range of ~10°. Optimization of the design, eliminating astigmatism, would allow one to extend the temperature range to about 30. The long-term mirror figure instability at a constant temperature reaches λ/20 rms in 16 days. The P-V error with respect to the nearest sphere changes from λ/20 in the first day, to about λ/10 in the 16-th day. The tests show that MMDM is stable enough to make a reasonable alternative to free-form optics in applications that require various optical shapes to be formed with a single element.

Citation Download Citation

Gleb Vdovin, Oleg Soloviev, and Seva Patlan "Stability of the micromachined membrane deformable mirror as a freeform optical element", Proc. SPIE 9193, Novel Optical Systems Design and Optimization XVII, 91930L (12 September 2014); https://doi.org/10.1117/12.2063243

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available