Study on the micro-milling of optical microstructure with the assist of the workpiece vibration

Guo Li; Fei Ding; Bo Wang; Lin Che; Chen Feng Zhang

doi:10.1117/12.2069852

21 August 2014 Study on the micro-milling of optical microstructure with the assist of the workpiece vibration

Guo Li, Fei Ding, Bo Wang, Lin Che, Chen Feng Zhang

Proceedings Volume 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 92830H (2014) https://doi.org/10.1117/12.2069852
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

Precision micro-milling technology is an important method to machine microstructure. However, precision micro-milling cutting system has relatively low stiffness. This will directly lead to the deterioration of the machining quality and thus cannot fulfill the high accuracy requirements of parts. Vibration assisted machining has produced a good effect in high stiffness cutting system using non-rotary tool. In this paper, the workpiece vibration assisted method is adopted instead, to improve the processing condition and the practical machining quality.The vibration assisted system is a vibration worktable driven by a piezoelectric ceramic actuator. In order to study the influence of vibration frequency on the machining quality, a non-resonant vibration assisted worktable is designed to realize the adjustment of vibration frequency. Orthogonal experiment is conducted to study the influence of three factors including the feed rate, vibration frequency and amplitude on the machining quality. The ranges of these factors are 1 μm/z to 5 μm/z, 500 Hz to 4000 Hz, and 0.5 μm to 2 μm, respectively. The experimental results show that, in the extent of the process parameters, form error (P-V value) and roughness (Ra) decrease as the vibration frequency increases, while the vibration amplitude contributes to good surface quality only in a proper range. Too low amplitude has little influence on the machining quality, and too high amplitude may even worsen the quality. And after the vibration assisted method is applied, the PV value and Ra can be reduced by approximately 27% and 42%.

Citation Download Citation

Guo Li, Fei Ding, Bo Wang, Lin Che, and Chen Feng Zhang "Study on the micro-milling of optical microstructure with the assist of the workpiece vibration", Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 92830H (21 August 2014); https://doi.org/10.1117/12.2069852

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Micro cutting

Teeth

Photovoltaics

Radium

Surface roughness

Spindles

Ceramics

Show All Keywords

Keywords/Phrases

Search In:

Publication Years