Paper
19 March 2015 Photo-induced large-scale circular surface-relief diffraction gratings on azo-glass
James Leibold, Ribal Georges Sabat
Author Affiliations +
Abstract
Novel metallic light-interfering fixtures were designed and fabricated in order to achieve a laser interference pattern of constant-pitch, concentric and sinusoidal light variations. These fixtures consisted of annular rings with the inner diameter shaped conically. Azobenzene-containing solid thin-films were subsequently placed behind the fixture and circular surface-relief diffraction gratings were inscribed due to the azo molecules photochemical isomerization process. Gratings pitches were dependent on the fixture dimensions and ranged from 600 to 1400 nm with depths up to 250 nm.
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James Leibold and Ribal Georges Sabat "Photo-induced large-scale circular surface-relief diffraction gratings on azo-glass", Proc. SPIE 9423, Alternative Lithographic Technologies VII, 94231V (19 March 2015); https://doi.org/10.1117/12.2076368
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KEYWORDS
Diffraction gratings

Diffraction

Atomic force microscopy

Collimation

Commercial off the shelf technology

Scanning electron microscopy

Laser beam diagnostics

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