Optical properties of Fe2O3 deposited by IBAD and its usage in interference filters

Jiří Budasz; Jan Huťka; Jan Václavík

doi:10.1117/12.2176920

7 January 2015 Optical properties of Fe₂O₃ deposited by IBAD and its usage in interference filters

Jiří Budasz, Jan Huťka, Jan Václavík

Author Affiliations +

Proceedings Volume 9442, Optics and Measurement Conference 2014; 944207 (2015) https://doi.org/10.1117/12.2176920
Event: Optics and Measurement Conference 2014, 2014, Liberec, Czech Republic

Abstract

This paper deals with thin films of Hematite (Fe₂O₃) deposited by ion beam assisted deposition (IBAD). It describes variation of optical properties with deposition parameters, especially oxygen flow and deposition rate. Optimal deposition parameters for Fe₂O₃ thin film were identified with criterion of the highest possible refractive index and lowest absorption. Film properties were measured and modelled by spectroscopic ellipsometry. Design of Fabry-Perot interference filter was used as a case study to compare properties of a Fe₂O₃ and TiO₂ as a high refractive index materials. The first design uses combination of TiO₂ and SiO₂ layers, which is considered as a standard solution. The second design consists of Fe₂O₃ and YF₃ layers. Comparison of these two designs shows that the design with SiO₂ and Fe₂O₃ has considerably lower layer count. Due to the fact that Fe₂O₃ has significant absorption in the visible spectra its use is limited to red and infrared wavelengths. The paper describes deposition of designed filter (Fe₂O₃ and YF₃) and measurement of its properties. Measured data are compared with the design.

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Jiří Budasz, Jan Huťka, and Jan Václavík "Optical properties of Fe₂O₃ deposited by IBAD and its usage in interference filters", Proc. SPIE 9442, Optics and Measurement Conference 2014, 944207 (7 January 2015); https://doi.org/10.1117/12.2176920

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