Input-shaped actuation of electromagnetic MEMS mirrors

Jörg Reitterer; Franz Fidler; Gerhard Schmid; Christian Hambeck; Ferdinand Saint Julien-Wallsee; Walter Leeb; Ulrich Schmid

doi:10.1117/12.2181241

21 May 2015 Input-shaped actuation of electromagnetic MEMS mirrors

Jörg Reitterer, Franz Fidler, Gerhard Schmid, Christian Hambeck, Ferdinand Saint Julien-Wallsee, Walter Leeb, Ulrich Schmid

Author Affiliations +

Proceedings Volume 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems; 95170J (2015) https://doi.org/10.1117/12.2181241
Event: SPIE Microtechnologies, 2015, Barcelona, Spain

Abstract

For many applications of MEMS actuators a well-defined trajectory of the movable device component is crucial when using a simple and inexpensive open-loop controller. We have applied to quasi-statically actuated electromagnetic MEMS mirrors the control technique called "input shaping", which is widely used for systems at the macro-scale and to a lesser extent also to systems at the micro-scale. We derive the impulse response of a filter which suppresses the excitation of undesired resonant modes and present simulation and measurement results of the oscillation-free linear MEMS mirror movement. The robustness of different input shaping filter types with respect to errors in the estimation of the system parameters, i.e., resonance frequency and damping ratio, is analyzed.

Citation Download Citation

Jörg Reitterer, Franz Fidler, Gerhard Schmid, Christian Hambeck, Ferdinand Saint Julien-Wallsee, Walter Leeb, and Ulrich Schmid "Input-shaped actuation of electromagnetic MEMS mirrors", Proc. SPIE 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 95170J (21 May 2015); https://doi.org/10.1117/12.2181241

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