Soft x-ray laser ablation mass spectrometry for materials study and nanoscale chemical imaging

Ilya Kuznetsov; Tomas Burian; Libor Juha; Regina Soufli; Jorge Filevich; M. Woolston; Elliot R. Bernstein; Dean C. Crick; D. Carlton; W. Chao; E. H. Anderson; Jorge J. Rocca; Carmen S. Menoni

doi:10.1117/12.2188645

22 September 2015 Soft x-ray laser ablation mass spectrometry for materials study and nanoscale chemical imaging

Ilya Kuznetsov, Tomas Burian, Libor Juha, Regina Soufli, Jorge Filevich, M. Woolston, Elliot R. Bernstein, Dean C. Crick, D. Carlton, W. Chao, E. H. Anderson, Jorge J. Rocca, Carmen S. Menoni

Author Affiliations +

Proceedings Volume 9589, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI; 958905 (2015) https://doi.org/10.1117/12.2188645
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

There are significant advantages for using a compact capillary discharge soft x-ray laser (SXRL) with wavelength of 46.9 nm for mass spectrometry applications. The 26.4 eV energy photons provide efficient single-photon ionization while preserving the structure of molecules and clusters. The tens of nanometers absorption depth of the radiation coupled with the focusing of the laser beam to diameter of ∼100 nm result in the ablation of atto-liter scale craters which in turn enable high resolution mass spectral imaging of solid samples. In this paper we describe results on the analysis of composition depth-profiling of multilayer oxide stack and material studies in photoresists, ionic crystals, and magnesium corrosion products using SXRL ablation mass spectrometry, a method first demonstrated by our group. These materials are used in a variety of soft x-ray applications such as detectors, multilayer optics, and many more.

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Ilya Kuznetsov, Tomas Burian, Libor Juha, Regina Soufli, Jorge Filevich, M. Woolston, Elliot R. Bernstein, Dean C. Crick, D. Carlton, W. Chao, E. H. Anderson, Jorge J. Rocca, and Carmen S. Menoni "Soft x-ray laser ablation mass spectrometry for materials study and nanoscale chemical imaging", Proc. SPIE 9589, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI, 958905 (22 September 2015); https://doi.org/10.1117/12.2188645

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