Non-null annular subaperture stitching interferometry for aspheric test

Lei Zhang; Dong Liu; Tu Shi; Yongying Yang; Shiyao Chong; Liang Miao; Wei Huang; Yibing Shen; Jian Bai

doi:10.1117/12.2195818

11 October 2015 Non-null annular subaperture stitching interferometry for aspheric test

Lei Zhang, Dong Liu, Tu Shi, Yongying Yang, Shiyao Chong, Liang Miao, Wei Huang, Yibing Shen, Jian Bai

Proceedings Volume 9633, Optifab 2015; 96331Q (2015) https://doi.org/10.1117/12.2195818
Event: SPIE Optifab, 2015, Rochester, New York, United States

Abstract

A non-null annular subaperture stitching interferometry (NASSI), combining the subaperture stitching idea and non-null test method, is proposed for steep aspheric testing. Compared with standard annular subaperture stitching interferometry (ASSI), a partial null lens (PNL) is employed as an alternative to the transmission sphere, to generate different aspherical wavefronts as the references. The coverage subaperture number would thus be reduced greatly for the better performance of aspherical wavefronts in matching the local slope of aspheric surfaces. Instead of various mathematical stitching algorithms, a simultaneous reverse optimizing reconstruction (SROR) method based on system modeling and ray tracing is proposed for full aperture figure error reconstruction. All the subaperture measurements are simulated simultaneously with a multi-configuration model in a ray-tracing program, including the interferometric system modeling and subaperture misalignments modeling. With the multi-configuration model, full aperture figure error would be extracted in form of Zernike polynomials from subapertures wavefront data by the SROR method. This method concurrently accomplishes subaperture retrace error and misalignment correction, requiring neither complex mathematical algorithms nor subaperture overlaps. A numerical simulation exhibits the comparison of the performance of the NASSI and standard ASSI, which demonstrates the high accuracy of the NASSI in testing steep aspheric. Experimental results of NASSI are shown to be in good agreement with that of Zygo® Verifire^TM Asphere interferometer.

Citation Download Citation

Lei Zhang, Dong Liu, Tu Shi, Yongying Yang, Shiyao Chong, Liang Miao, Wei Huang, Yibing Shen, and Jian Bai "Non-null annular subaperture stitching interferometry for aspheric test", Proc. SPIE 9633, Optifab 2015, 96331Q (11 October 2015); https://doi.org/10.1117/12.2195818

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KEYWORDS

Aspheric lenses

Wavefronts

Ray tracing

Interferometers

Systems modeling

Stitching interferometry

Mathematical modeling

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