Annular-force-based variable curvature mirror combined with multi-point actuation array to improve the surface figure accuracy: a prototype design

Hui Zhao; Xiaopeng Xie; Guorui Ren; Yunfei Du; Meiying Liu; Jingxuan Wei

doi:10.1117/12.2242256

2 November 2016 Annular-force-based variable curvature mirror combined with multi-point actuation array to improve the surface figure accuracy: a prototype design

Hui Zhao, Xiaopeng Xie, Guorui Ren, Yunfei Du, Meiying Liu, Jingxuan Wei

Author Affiliations +

Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96831V (2016) https://doi.org/10.1117/12.2242256
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

In recent years, a novel optical zooming technique has been paid much attention. With the help of optical leveraging effect, it is possible to alter the system focal length dramatically without moving elements involved in by only changing the curvature radius of VCM (variable curvature mirror) slightly. With no doubt, VCM is the key to realize non-moving element optical zooming and it has to provide large enough saggitus variation while still maintaining the high surface figure accuracy to ensure high quality imaging. In our previously published paper, an annular force based VCM has been designed, fabricated and tested. Experiments demonstrate that with the aperture of 100mm and thickness of 2mm, the VCM could generate a large saggitus variation exceeding 30λ (λ=632.8nm). However, the optical quality degrades very fast and this makes such a VCM unsuitable for optical imaging in visible band. Therefore in this manuscript, a multipoint actuation array, which is composed of totally 49 piezoelectric actuators, is embedded into the annular structure to aim to correct the surface figure distortion caused by large saggitus variation. The new structure model has been designed and numerical simulation indicates that the surface figure distortion could be well corrected as long as the degraded surface figure accuracy is better than 1.8λ (λ=632.8nm) (RMS). Based on this, a new prototype VCM is being fabricated and intermediate results are reported here.

Citation Download Citation

Hui Zhao, Xiaopeng Xie, Guorui Ren, Yunfei Du, Meiying Liu, and Jingxuan Wei "Annular-force-based variable curvature mirror combined with multi-point actuation array to improve the surface figure accuracy: a prototype design", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96831V (2 November 2016); https://doi.org/10.1117/12.2242256

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
10 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Actuators

Mirrors

Distortion

Prototyping

Optical components

Surface finishing

Polishing

Show All Keywords

Keywords/Phrases

Search In:

Publication Years