A new multi-probe scanning method for measuring optical surface

Dede Zhai; Ziqiang Yin; Shanyong Chen; Fujing Tian

doi:10.1117/12.2243800

27 September 2016 A new multi-probe scanning method for measuring optical surface

Dede Zhai, Ziqiang Yin, Shanyong Chen, Fujing Tian

Author Affiliations +

Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96841K (2016) https://doi.org/10.1117/12.2243800
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

In form metrology, multi-probe scanning method based on error separation technique can be used successfully to eliminate motion error of slideway. Due to high repeatability of flexure hinge, a virtual multiple sensor concept is presented. The system employs a single probe with the accurate movement of flexure hinge to achieve virtual multiprobe. This single probe scanning method can realize and extend the function of multiple-probe method. This paper describes the principle of this new method; Measurement process of method is modeled and the predefined test curve is reconstructed by the application of simultaneous equation and least-squares methods. It shows that scanning systems with virtual multiple sensors allow the influence of random and systematic errors to be reduced. We also conducted the experiment repeatedly to measure the profile of workpiece. It shows that reconstructed curves in each experiment are nearly superposed.

Citation Download Citation

Dede Zhai, Ziqiang Yin, Shanyong Chen, and Fujing Tian "A new multi-probe scanning method for measuring optical surface", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96841K (27 September 2016); https://doi.org/10.1117/12.2243800

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Sensors

Error analysis

Mathematical modeling

Metrology

Systems modeling

3D metrology

Autocollimators

Show All Keywords

Keywords/Phrases

Search In:

Publication Years