Selective structuring of multi-layer functional thin films using a laser-induced shockwave delamination process

M. Ehrhardt; P. Lorenz; L. Bayer; C. Molpeceres; C. Antonio Herrera Ramirez; K. Zimmer

doi:10.1117/12.2212495

14 March 2016 Selective structuring of multi-layer functional thin films using a laser-induced shockwave delamination process

M. Ehrhardt, P. Lorenz, L. Bayer, C. Molpeceres, C. Antonio Herrera Ramirez, K. Zimmer

Author Affiliations +

Proceedings Volume 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI; 973503 (2016) https://doi.org/10.1117/12.2212495
Event: SPIE LASE, 2016, San Francisco, California, United States

Abstract

The laser assisted micro structuring of thin films especially for electronic applications without influence the functionality of the multi-layer system e.g. due to melting products is a challenge for the laser micro machining techniques. The P2 scribing of copper indium gallium selenide (CIGS) solar cells on stainless steel carrier foil was studied using shockwave- induced film delamination (SWIFD) patterning. The delamination process is induced by a shock wave generated by the laser ablation of the rear side of the carrier foil. In the present study UV nanosecond laser pulses provided by a KrF excimer laser were used to induce the SWIFD process. The morphology and size of the achieved thin-film structures were studied in dependence on various laser irradiation parameters by optical and scanning electron microscopy (SEM). Furthermore, the materials composition after the laser patterning was analyzed by energy dispersive X-ray spectroscopy (EDX). The temporal sequences of processes involved in the SWIFD process were analyzed with high speed shadowgraph experiments. The results of the present study shows that in dependence on the laser parameter used a large process window exist in which the CIGS thin film can be removed from the substrate without visible thermal modification of the CIGS thin film.

Citation Download Citation

M. Ehrhardt, P. Lorenz, L. Bayer, C. Molpeceres, C. Antonio Herrera Ramirez, and K. Zimmer "Selective structuring of multi-layer functional thin films using a laser-induced shockwave delamination process", Proc. SPIE 9735, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXI, 973503 (14 March 2016); https://doi.org/10.1117/12.2212495

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