Hyperspectral scanning white light interferometry based on compressive imaging

Mohammad Azari; Nasim Habibi; Mehrdad Abolbashari; Faramarz Farahi

doi:10.1117/12.2213101

15 March 2016 Hyperspectral scanning white light interferometry based on compressive imaging

Mohammad Azari, Nasim Habibi, Mehrdad Abolbashari, Faramarz Farahi

Proceedings Volume 9761, Emerging Digital Micromirror Device Based Systems and Applications VIII; 97610H (2016) https://doi.org/10.1117/12.2213101
Event: SPIE OPTO, 2016, San Francisco, California, United States

Abstract

We have developed a compressive hyperspectral imaging system that is based on single-pixel camera architecture. We have incorporated the developed system in a scanning white-light interferometer (SWLI) and showed that replacing SWLI’s CCD-based camera by the compressive hyperspectral imaging system, we have access to high-resolution multispectral images of interferometer’s fringes. Using these multi-spectral images, the system is capable of simultaneous spectroscopy of the surface, which can be used, for example, to eliminate the effect of surface contamination and providing new spectral information for fringe signal analysis which could be used to reduce the need for vertical scan, therefore making height measurement more tolerant to object’s position.

Citation Download Citation

Mohammad Azari, Nasim Habibi, Mehrdad Abolbashari, and Faramarz Farahi "Hyperspectral scanning white light interferometry based on compressive imaging", Proc. SPIE 9761, Emerging Digital Micromirror Device Based Systems and Applications VIII, 97610H (15 March 2016); https://doi.org/10.1117/12.2213101

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