Metal reduction at point-of-use filtration

Toru Umeda; Shusaku Daikoku; Rao Varanasi; Shuichi Tsuzuki

doi:10.1117/12.2218400

25 March 2016 Metal reduction at point-of-use filtration

Toru Umeda, Shusaku Daikoku, Rao Varanasi, Shuichi Tsuzuki

Proceedings Volume 9779, Advances in Patterning Materials and Processes XXXIII; 97791R (2016) https://doi.org/10.1117/12.2218400
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

We explored the metal removal efficiency of Nylon 6,6 and HDPE (High Density Polyethylene) membrane based filters, in solvents of varying degree of polarity such as Cyclohexanone and 70:30 mixture of PGME (Propylene Glycol Monomethyl Ether) and PGMEA (Propylene Glycol Monomethyl Ether), In all the solvents tested, Nylon 6,6 membrane filtration was found to be significantly more effective in removing metals than HDPE membranes, regardless of their respective membrane pore sizes. Hydrophilic interaction chromatography (HILIC) mechanism was invoked to rationalize metal removal efficiency dependence on solvent hydrophobicity.

Citation Download Citation

Toru Umeda, Shusaku Daikoku, Rao Varanasi, and Shuichi Tsuzuki "Metal reduction at point-of-use filtration", Proc. SPIE 9779, Advances in Patterning Materials and Processes XXXIII, 97791R (25 March 2016); https://doi.org/10.1117/12.2218400

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