Research of absolute testing based on N-position rotations

Huanhuan Liu; Shijie Liu; Wanrong Gao; Qiaoran Fang

doi:10.1117/12.2228305

26 January 2016 Research of absolute testing based on N-position rotations

Huanhuan Liu, Shijie Liu, Wanrong Gao, Qiaoran Fang

Proceedings Volume 9796, Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015; 97960P (2016) https://doi.org/10.1117/12.2228305
Event: Selected Proceedings of the Chinese Society for Optical Engineering Conferences held November 2015, 2015, Various, China

Abstract

The full-aperture and full-frequency absolute surfaces of optical flats are of great significant for industrial applications but hard to achieve. To measure them simultaneously, Kuechel proposed an absolute testing based on N-position rotations by adding a set of measurement data of N-position rotations, in comparison to the traditional four measurements. Algorithm simulation and absolute detection experiments have been conducted before, however, the influence of rotation angle error has not been analyzed, and the full-aperture contrast experiments have not been conducted. In this paper, the influence of rotation angle error was analyzed, and the measurement result is within acceptable range even when the angle error reaches 1°. Moreover, to verify the accuracy of this method, full-aperture contrast experiments were proposed innovatively besides the two linear profiles contrast experiments. The contrast experiments prove the accuracy of the full-aperture absolute measured results, other than the accuracy of the two linear profiles results.

Citation Download Citation

Huanhuan Liu, Shijie Liu, Wanrong Gao, and Qiaoran Fang "Research of absolute testing based on N-position rotations", Proc. SPIE 9796, Selected Papers of the Photoelectronic Technology Committee Conferences held November 2015, 97960P (26 January 2016); https://doi.org/10.1117/12.2228305

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