Design and implementation of precise x-ray metrology to control a 45-cm long x-ray deformable mirror

Lisa A. Poyneer; Jaime Ruz Armendariz; Jun Feng; Weilun Chao; Jessie Jackson; James Nasiatka; Todd Decker

doi:10.1117/12.2236568

9 September 2016 Design and implementation of precise x-ray metrology to control a 45-cm long x-ray deformable mirror

Lisa A. Poyneer, Jaime Ruz Armendariz, Jun Feng, Weilun Chao, Jessie Jackson, James Nasiatka, Todd Decker

Proceedings Volume 9965, Adaptive X-Ray Optics IV; 99650G (2016) https://doi.org/10.1117/12.2236568
Event: SPIE Optical Engineering + Applications, 2016, San Diego, California, United States

Abstract

Our experiments at beamline 5.3.1 of the Advanced Light Source feature a 45-cm long x-ray deformable mirror (XDM). We describe the experiment and present recent results in two areas. First, we directly image the 3 keV x-ray beam and demonstrate customized shaping of its intensity in the near field. Detailed physics simulations of the experiment agree very well with actual measurements. Second, we use a grating interferometer to measure known figure errors applied to the surface of the XDM. A relative height change on the XDM of 2.5 nm RMS is measured at an SNR of eight in single measurement. A provisional error budget analysis indicates that uncalibrated errors in the system are by far the largest component.

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Lisa A. Poyneer, Jaime Ruz Armendariz, Jun Feng, Weilun Chao, Jessie Jackson, James Nasiatka, and Todd Decker "Design and implementation of precise x-ray metrology to control a 45-cm long x-ray deformable mirror", Proc. SPIE 9965, Adaptive X-Ray Optics IV, 99650G (9 September 2016); https://doi.org/10.1117/12.2236568

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KEYWORDS

X-rays

Charge-coupled devices

Sensors

Photons

Calibration

Signal to noise ratio

Metrology

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