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We can grow high-In-content InGaN-based red LED structures by our original MOVPE. Using commercial InGaN-based blue and green LED wafers, we have fabricated RGB micro-LEDs and RGB monochromatic 10 X 10 micro-LED arrays. The size of the micro-LED was 17 m square. The red array showed the peak wavelength at 630 nm and the FWHM of 62.9 nm at 50 A/cm2. Its light output power density was as high as 176 mW/cm2, and the absolute EQE was approximately 0.4%. The RGB micro-LED arrays covered as good as 81.3% of the Rec. 2020 color space in CIE 1931 at 50 A/cm2.
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