Presentation
9 March 2022 MOCVD technology for high-yield red μLED manufacturing
Author Affiliations +
Abstract
In this presentation, we will discuss the requirements for Red microLEDs for advanced displays, the corresponding MOCVD Epitaxy capability needs,and share Veeco’s recent learnings.
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Swaminathan T. Srinivasan, Eric Armour, Bumjoon Kim, Wei Chan, Scott Maxwell, Bojan Mitrovic, Jay Montgomery, Sandeep Krishnan, Earl Marcelo, and Drew Hanser "MOCVD technology for high-yield red μLED manufacturing", Proc. SPIE PC12022, Light-Emitting Devices, Materials, and Applications XXVI, PC120220N (9 March 2022); https://doi.org/10.1117/12.2611303
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KEYWORDS
Metalorganic chemical vapor deposition

Manufacturing

Epitaxy

Particles

Gases

Head-mounted displays

Interfaces

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