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9 August 2022 Second harmonic generation in silicon oxynitride thin films
Jakub Lukeš, Karel Zidek
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Proceedings Volume PC12143, Nonlinear Optics and its Applications 2022; PC121430O (2022) https://doi.org/10.1117/12.2624580
Event: SPIE Photonics Europe, 2022, Strasbourg, France
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Jakub Lukeš and Karel Zidek "Second harmonic generation in silicon oxynitride thin films", Proc. SPIE PC12143, Nonlinear Optics and its Applications 2022, PC121430O (9 August 2022); https://doi.org/10.1117/12.2624580
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KEYWORDS
Second-harmonic generation
Silicon
Thin films
Silicon films
Interfaces
Harmonic generation
Oxides
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