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17 March 2023 Laser-based modification of ALD-grown 2D-transition metal dichalcogenides
Andreas Ostendorf, Malte Becher, Julia Jagosz, Claudia Bock
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Proceedings Volume PC12410, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2023; PC1241005 (2023) https://doi.org/10.1117/12.2651197
Event: SPIE LASE, 2023, San Francisco, California, United States
Abstract
2D materials like transition metal dichalcogenides (TMDCs) are promising materials for the next generation of flexible devices. With low-temperature Atomic Layer Deposition a direct large area deposition of these materials on temperature sensitive substrates becomes possible. Due to these substrates conventional post- and further processing methods, like thermal annealing, are not suitable. With the usage of ultrashort pulsed Laser a moification of these films with very small heat-affected zones can be done. This allows a selective increase of crystallinity in amorphous MoS2 films or phase engineering between the metallic and semiconducting phase in MoS2 independent of the growing substrate.
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Andreas Ostendorf, Malte Becher, Julia Jagosz, and Claudia Bock "Laser-based modification of ALD-grown 2D-transition metal dichalcogenides", Proc. SPIE PC12410, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2023, PC1241005 (17 March 2023); https://doi.org/10.1117/12.2651197
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KEYWORDS
Crystals
Metals
Annealing
Raman spectroscopy
Atomic layer deposition
Optical properties
Pulsed laser operation
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