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17 March 2023 Beam shaping of high-energy beams for laser micromachining of transparent materials
Vytautas Jukna, Ernestas Nacius, Orestas Ulcinas, Sergejus Orlovas
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Proceedings Volume PC12411, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXIII; PC124110K (2023) https://doi.org/10.1117/12.2657417
Event: SPIE LASE, 2023, San Francisco, California, United States
Abstract
Micromachining of transparent materials with high-power lasers demands new approaches to utilize most of the laser power without reduction of the quality. The usually exploited Gaussian beams become absolute when specific beams can be utilized to do the set task. For instance, the Bessel beams can be used to drill very high aspect ratio holes with a single laser pulse, which increases the speed of manufacturing by many orders. In our research, we have even more versatility in the beam shapes as we use the beam shaping techniques which withstand high-power laser pulses. Therefore, higher-order, vectorial Bessel beams, and flattop beams were used to micromachine transparent materials and results will be shown.
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Vytautas Jukna, Ernestas Nacius, Orestas Ulcinas, and Sergejus Orlovas "Beam shaping of high-energy beams for laser micromachining of transparent materials", Proc. SPIE PC12411, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXIII, PC124110K (17 March 2023); https://doi.org/10.1117/12.2657417
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KEYWORDS
Micromachining
Beam shaping
Gaussian beams
Laser damage threshold
Laser welding
Microfluidics
Modulation
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