Atomic layer deposited gallium oxide thin film monitored by continuous in-situ spectroscopic ellipsometry (Conference Presentation)

Florian Maudet

doi:10.1117/12.2664324

16 March 2023 Atomic layer deposited gallium oxide thin film monitored by continuous in-situ spectroscopic ellipsometry (Conference Presentation)

Florian Maudet

Author Affiliations +

Proceedings Volume PC12422, Oxide-based Materials and Devices XIV; PC124220E (2023) https://doi.org/10.1117/12.2664324
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

The growth of a-GaOx thin films by plasma-enhanced atomic layer deposition is studied by in-situ spectroscopic ellipsometry. A method is developed to extract the dielectric constant and thickness of ultrathin films (< 1 nm) unambiguously. The optical properties were calculated after each step and for all cycles, which allows to follow their evolution until a “bulk-like” gallium oxide film is reached. We show that a-GaOx films can be self-doped with the introduction of oxygen vacancies to obtain semiconducting properties. With additional information retrieved from the in-situ monitoring, a better understanding and faster development of growth processes are gained.

Conference Presentation

Citation Download Citation

Florian Maudet "Atomic layer deposited gallium oxide thin film monitored by continuous in-situ spectroscopic ellipsometry (Conference Presentation)", Proc. SPIE PC12422, Oxide-based Materials and Devices XIV, PC124220E (16 March 2023); https://doi.org/10.1117/12.2664324

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available