Presentation
8 June 2023 Mass spectrometry of ion emission from covalent and molecular solids ablated by nanosecond EUV laser pulses used for focused-beam characterization
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Abstract
This conference presentation was prepared for SPIE Optics + Optoelectronics, 2023.
Conference Presentation
© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ludek Vyšín, Jaromír Chalupský, Věra Hájková, Zuzana Kuglerová, Ladislav Fekete, Lydia A. Rush, Libor Juha, Jorge J. Rocca, and Carmen S. Menoni "Mass spectrometry of ion emission from covalent and molecular solids ablated by nanosecond EUV laser pulses used for focused-beam characterization", Proc. SPIE PC12582, Compact Radiation Sources from EUV to Gamma-rays: Development and Applications, PC125820F (8 June 2023); https://doi.org/10.1117/12.2666755
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KEYWORDS
Extreme ultraviolet

Laser ablation

Mass spectrometry

Molecular lasers

Ions

Molecular spectroscopy

Solids

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