Large scale three-dimensional optical Yagi-Uda nanoantenna array fabricated using nanospherical-lens lithography

Chia-Ling Tsao; Chi-Ching Liu; Chieh-Chun Chang; Yun-Chorng Chang

doi:10.1117/12.2676299

5 October 2023 Large scale three-dimensional optical Yagi-Uda nanoantenna array fabricated using nanospherical-lens lithography

Chia-Ling Tsao, Chi-Ching Liu, Chieh-Chun Chang, Yun-Chorng Chang

Author Affiliations +

Proceedings Volume PC12648, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XXI; PC126481J (2023) https://doi.org/10.1117/12.2676299
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States

Conference Poster

Abstract

Three-dimensional optical Yagi-Uda nanoantenna array are fabricated using Nanospherical-Lens Lithography (NLL). The fabrication method can produce nanoantenna array that covers large area and with high throughput. The individual Yagi-Uda nanoantenna is consisted with 3 Au nanodisks separated by a thin layer of SiO₂ obtained through sequential evaporation using NLL. The operation wavelength of the nanoantenna is designed is in the near infrared, which can be easily controlled by varying the structural parameters during NLL. We believe the results shown in this study can be applied to obtain directional antenna of nano-emitters and receivers in the near future.

Citation Download Citation

Chia-Ling Tsao, Chi-Ching Liu, Chieh-Chun Chang, and Yun-Chorng Chang "Large scale three-dimensional optical Yagi-Uda nanoantenna array fabricated using nanospherical-lens lithography", Proc. SPIE PC12648, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XXI, PC126481J (5 October 2023); https://doi.org/10.1117/12.2676299

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