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13 March 2024 Precision micromachining using a novel femtosecond flat-top UV laser
Kamilė Kasaciunaitė, Mykolas Karpavicius, Lukas Rimkus, Martynas Barkauskas, Simas Butkus
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Proceedings Volume PC12873, Laser-based Micro- and Nanoprocessing XVIII; PC128730H (2024) https://doi.org/10.1117/12.3002202
Event: SPIE LASE, 2024, San Francisco, California, United States
Abstract
The study compares two laser beam intensity distributions, namely the Gaussian beam and the flat-top, for micromachining applications at a UV wavelength of 257 nm (4th). A novel laser system with integrated beam shaping capabilities, including a flat-top intensity profile is introduced. The differences when micromachining materials using the top-hat intensity profile are compared to the conventional Gaussian intensity distribution.
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Kamilė Kasaciunaitė, Mykolas Karpavicius, Lukas Rimkus, Martynas Barkauskas, and Simas Butkus "Precision micromachining using a novel femtosecond flat-top UV laser", Proc. SPIE PC12873, Laser-based Micro- and Nanoprocessing XVIII, PC128730H (13 March 2024); https://doi.org/10.1117/12.3002202
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KEYWORDS
Micromachining
Ultraviolet radiation
Femtosecond phenomena
Harmonic generation
Laser ablation
Laser engraving
Surface roughness
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