3D nanopatterning of volumetric lenses, waveguides, and metamaterials enabling ultra-dense, on-chip 3D optics

Paul V. Braun

doi:10.1117/12.3011437

13 March 2024 3D nanopatterning of volumetric lenses, waveguides, and metamaterials enabling ultra-dense, on-chip 3D optics

Paul V. Braun

Author Affiliations +

Proceedings Volume PC12896, Photonic and Phononic Properties of Engineered Nanostructures XIV; PC1289601 (2024) https://doi.org/10.1117/12.3011437
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

Here, we present Subsurface Controllable Refractive Index via Beam Exposure (SCRIBE), a direct-write lithographic approach that enables the fabrication of volumetric microscale gradient refractive index lenses, waveguides, and metamaterials. The basis of SCRIBE is multiphoton polymerization inside monomer-filled nanoporous silicon and silica scaffolds. Adjusting the laser exposure during printing enables 3D submicron control of the polymer infilling and thus the refractive index over a range of greater than 0.3 and chromatic dispersion tuning. A Luneburg lens operating at visible wavelengths, achromatic doublets, multicomponent optics, photonic nanojets and subsurface 3D waveguides were all formed.

Conference Presentation

Citation Download Citation

Paul V. Braun "3D nanopatterning of volumetric lenses, waveguides, and metamaterials enabling ultra-dense, on-chip 3D optics", Proc. SPIE PC12896, Photonic and Phononic Properties of Engineered Nanostructures XIV, PC1289601 (13 March 2024); https://doi.org/10.1117/12.3011437

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