Maximizing availability by enhancing operational efficiency and implementing sophisticated maintenance strategies in complex ArFi light source

Shinichi Matsumoto; Satoshi Tanaka; Toshihiro Oga; Takamitsu Komaki; Katsuhiko Wakana; Takeshi Ohta; Takashi Saitou

doi:10.1117/12.3009846

10 April 2024 Maximizing availability by enhancing operational efficiency and implementing sophisticated maintenance strategies in complex ArFi light source

Shinichi Matsumoto, Satoshi Tanaka, Toshihiro Oga, Takamitsu Komaki, Katsuhiko Wakana, Takeshi Ohta, Takashi Saitou

Author Affiliations +

Proceedings Volume PC12953, Optical and EUV Nanolithography XXXVII; PC129530U (2024) https://doi.org/10.1117/12.3009846
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States

Conference Poster

Abstract

Maximizing efficiency in complex laser systems by integrating machine learning and optimizing exchange parts. Challenges include reducing maintenance time, improving module lifetime, and implementing proactive maintenance through data analysis. Specific developments include hardware improvements, skill enhancements for service engineers, extending module lifetime, and data analysis for lifetime prediction.

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Shinichi Matsumoto, Satoshi Tanaka, Toshihiro Oga, Takamitsu Komaki, Katsuhiko Wakana, Takeshi Ohta, and Takashi Saitou "Maximizing availability by enhancing operational efficiency and implementing sophisticated maintenance strategies in complex ArFi light source", Proc. SPIE PC12953, Optical and EUV Nanolithography XXXVII, PC129530U (10 April 2024); https://doi.org/10.1117/12.3009846

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