The exploration of novel 3D lithography by utilizing the electron beam driving

Zhenjiang Li; Beining Li; Yanqing Wu; Renzhong Tai; Yong Wang

doi:10.1117/12.3017385

6 June 2024 The exploration of novel 3D lithography by utilizing the electron beam driving

Zhenjiang Li, Beining Li, Yanqing Wu, Renzhong Tai, Yong Wang

Proceedings Volume PC12995, 3D Printed Optics and Additive Photonic Manufacturing IV; PC129950F (2024) https://doi.org/10.1117/12.3017385
Event: SPIE Photonics Europe, 2024, Strasbourg, France

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Zhenjiang Li, Beining Li, Yanqing Wu, Renzhong Tai, and Yong Wang "The exploration of novel 3D lithography by utilizing the electron beam driving", Proc. SPIE PC12995, 3D Printed Optics and Additive Photonic Manufacturing IV, PC129950F (6 June 2024); https://doi.org/10.1117/12.3017385

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