JSR Micro, Inc.: JSR patterning and process materials for semiconductor manufacturing

Ramakrishnan Ayothi

doi:10.1117/12.2583886

18 September 2020 JSR Micro, Inc.: JSR patterning and process materials for semiconductor manufacturing

Ramakrishnan Ayothi

Author Affiliations +

Proceedings Volume PV20EX, SPIE Exhibition Product Demonstrations: PUV 2020; PV20EX01 (2020) https://doi.org/10.1117/12.2583886
Event: SPIE Photomask Technology + EUV Lithography, 2020, Online Only

Abstract

Photoresist, Topcoat Materials Multilayer Hardmask Materials, Packaging Materials and Process Materials

Conference Presentation

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Ramakrishnan Ayothi "JSR Micro, Inc.: JSR patterning and process materials for semiconductor manufacturing", Proc. SPIE PV20EX, SPIE Exhibition Product Demonstrations: PUV 2020, PV20EX01 (18 September 2020); https://doi.org/10.1117/12.2583886

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