CONFERENCE PROCEEDINGS
Advanced Search
Home > eBooks > Design Technology Co-Optimization in the Era of Sub-Resolution IC Scaling > Back Matter
Open Access
Back Matter
Book: Design Technology Co-Optimization in the Era of Sub-Resolution IC Scaling
Author(s): Lars W. Liebmann, Lawrence Pileggi, Kaushik Vaidyanathan
Published: 2016
https://doi.org/10.1117/3.2217861.bm
Author Affiliations +
PDF download only.
CHAPTER 1
 9 PAGES
DOWNLOAD PDF SAVE TO MY LIBRARY
Buy this book on SPIE.org
Buy this book on SPIE.orgBuy this book on SPIE.org
Lens.org Logo
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Computer aided design
Lithography
Optical lithography
Very large scale integration
Integrated circuits
Standards development
Logic
Subscribe to Digital Library
Receive Email Alerts on Newly Released Titles
Back to Top