Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

John H. Burnett; Simon G. Kaplan

doi:10.1117/1.1632501

1 January 2004 Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

John H. Burnett, Simon G. Kaplan

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 3, Issue 1, (January 2004). https://doi.org/10.1117/1.1632501

Abstract

We present accurate measurements of several important optical constants of high-purity water for wavelengths near 193.39 nm at 21.50°C: the absolute refractive index n = 1.436 62(2), the dispersion dn/dλ = -2.109(17)×10^-3 nm^-1, and the thermo-optic coefficient dn/dT = -1.00(4)×10^-4(°C)^-1. We determine these values by two independent approaches, the minimum deviation prism method and an interferometric technique, and find that they give mutually consistent results.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

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John H. Burnett and Simon G. Kaplan "Measurement of the refractive index and thermo-optic coefficient of water near 193 nm," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(1), (1 January 2004). https://doi.org/10.1117/1.1632501

Published: 1 January 2004

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