Three-dimensional aerial images of periodic patterns and the depth of focus for lines-and-spaces patterns (Erratum)

Anthony Yen

doi:10.1117/1.JMM.22.4.049801

7 December 2023 Three-dimensional aerial images of periodic patterns and the depth of focus for lines-and-spaces patterns (Erratum)

Anthony Yen

Author Affiliations +

Journal of Micro/Nanopatterning, Materials, and Metrology, Vol. 22, Issue 4, 049801 (December 2023). https://doi.org/10.1117/1.JMM.22.4.049801

Abstract

Erratum corrects several errors in mathematical expressions.

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Anthony Yen "Three-dimensional aerial images of periodic patterns and the depth of focus for lines-and-spaces patterns (Erratum)," Journal of Micro/Nanopatterning, Materials, and Metrology 22(4), 049801 (7 December 2023). https://doi.org/10.1117/1.JMM.22.4.049801

Published: 7 December 2023

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