Improved Resolution Of Multilayer X-Ray Coatings: A Distributed Fabry-Perot Etalon

M. P. Bruijin; J. Verhoeven; M. J. van der Wiel; W. J. Bartels

doi:10.1117/12.7974135

1 July 1987 Improved Resolution Of Multilayer X-Ray Coatings: A Distributed Fabry-Perot Etalon

M. P. Bruijin, J. Verhoeven, M. J. van der Wiel, W. J. Bartels

Author Affiliations +

Optical Engineering, Vol. 26, Issue 7, 267679 (July 1987). https://doi.org/10.1117/12.7974135

Abstract

A new type of multilayer x-ray reflection coating has been de-signed and deposited: a so-called distributed Fabry-Perot etalon, consist-ing of a normal periodic multilayer in which extra periods of only spacer material are distributed. As an example, we deposited a ReW/C multilayer (d = 22 A, 90 periods) in which 90 extra C periods (d = 22 A) were ran-domly distributed. At X = 1.54 A, the resolution X/AX was limited by sub-strate flatness and was measured to be 133 (compared to about 90 for a , regular 90 period stack). The peak reflectivity is 21%. Crucial for deposition of this structure was a reduced substrate temperature (T = -150°C). The effective roughness of the interfaces is a constant 5 A throughout the entire stack.

Citation Download Citation

M. P. Bruijin, J. Verhoeven, M. J. van der Wiel, and W. J. Bartels "Improved Resolution Of Multilayer X-Ray Coatings: A Distributed Fabry-Perot Etalon," Optical Engineering 26(7), 267679 (1 July 1987). https://doi.org/10.1117/12.7974135

Published: 1 July 1987

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE