Noncontact probe for profilometric measurement of small-form parts

Ming Chang; Kao-Hui Lin

doi:10.1117/1.1405416

1 October 2001 Noncontact probe for profilometric measurement of small-form parts

Ming Chang, Kao-Hui Lin

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Optical Engineering, Vol. 40, Issue 10, (October 2001). https://doi.org/10.1117/1.1405416

A low-cost and efficient probe for noncontact pro- filometric measurement of small-form parts is proposed. This measurement principle is based on the well-known projection fringe method. The fringe projection system consists of a laser diode light source and a simple lateral shearing interferometry mechanism. The measurement range can be flexibly adjusted to fit the size of the specimen. Experiments are implemented in the inspection of a ball grid array (BGA) substrate. Experimental results show that the measurement accuracy is in the micrometer region and repeatability in the submicrometer region. This provides the possibility for this system to be applied to 3-D profile measurement of a specimen of the order of a millimeter or smaller.

©(2001) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Ming Chang and Kao-Hui Lin "Noncontact probe for profilometric measurement of small-form parts," Optical Engineering 40(10), (1 October 2001). https://doi.org/10.1117/1.1405416

Published: 1 October 2001

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