Integrated optoelectric sensor for measurement of microdisplacement, roughness and microprofile

Zhaofei Zhou; Tao Zhang; Wenjie Li; Wei Huang

doi:10.1117/1.1518507

1 December 2002 Integrated opto-electric sensor for measurement of micro-displacement, roughness and micro-profile

Zhaofei Zhou, Tao Zhang, Wenjie Li, Wei Huang

Optical Engineering, Vol. 41, Issue 12, (December 2002). https://doi.org/10.1117/1.1518507

A study of integration for different sensing functions is described. Three different noncontact measuring functions, including a micrometer, a roughness meter, and a profilometer, are integrated into one new sensor. In this sensor, one common laser source, optical system, and photodetector are shared. Based on the theory of laser scattering and interferometry, this sensor can be used to measure the surface roughness and microprofile with the measurement range of R_a = 0.001 to 3 μm. Based on the theory of triangulation this sensor can be used to measure the microdisplacement with a measurement range of 0.5 to 300 μm. The accuracies of this sensor are similar to each existing single sensor for the same function. A typical application of this sensor is to complete the measurements of the diameter, surface quality, and form error of a cylinder or cannon in operation. This integrated sensor is applicable to design a virtual instrument with multiple functions.

©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Zhaofei Zhou, Tao Zhang, Wenjie Li, and Wei Huang "Integrated opto-electric sensor for measurement of micro-displacement, roughness and micro-profile," Optical Engineering 41(12), (1 December 2002). https://doi.org/10.1117/1.1518507

Published: 1 December 2002

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