High-accuracy small-angle measurement of the positioning error of a rotary table by using multiple-reflection optoelectronic methodology

Chun-Jen Chen; Psang Dain Lin

doi:10.1117/1.2802156

1 November 2007 High-accuracy small-angle measurement of the positioning error of a rotary table by using multiple-reflection optoelectronic methodology

Chun-Jen Chen, Psang Dain Lin

Author Affiliations +

Optical Engineering, Vol. 46, Issue 11, 113604 (November 2007). https://doi.org/10.1117/1.2802156

Abstract

To improve upon and provide a methodological alternative to published optoelectronic angle measurement systems, the paper performs high-accuracy angle measurement by use of laser diodes, dual-axis position sensing detectors, and a series of reflections between two first-surface mirrors. Measurement accuracy improves from 0.5 to 0.05 arc sec as the light ray is reflected back and forth several times between the mirrors. Analytic ray tracing is used to model the reflected light ray so as to determine the system equations implicitly in terms of the measured angles. The first-order Taylor series expansion provides a linear form of the system equations. To validate the system, a prototype is built. Calibration and stability experiments are performed. Experimental results show the resolution, accuracy, and measurement range are, respectively, 0.008, 0.05, and ±250 arc sec. Compared with traditional optical angle measurement systems, this method has many merits such as low cost, simple configuration, high sensitivity, and high linearity.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Chun-Jen Chen and Psang Dain Lin "High-accuracy small-angle measurement of the positioning error of a rotary table by using multiple-reflection optoelectronic methodology," Optical Engineering 46(11), 113604 (1 November 2007). https://doi.org/10.1117/1.2802156

Published: 1 November 2007

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available