Nano-roughness measurements with a modified Linnik microscope and the uses of full-field heterodyne interferometry

Yen-Liang Chen; Zhi-Cheng Jian; Hung-Chih Hsieh; Wang-Tsung Wu; Der-Chin Su

doi:10.1117/1.3050357

1 December 2008 Nano-roughness measurements with a modified Linnik microscope and the uses of full-field heterodyne interferometry

Yen-Liang Chen, Zhi-Cheng Jian, Hung-Chih Hsieh, Wang-Tsung Wu, Der-Chin Su

Author Affiliations +

Optical Engineering, Vol. 47, Issue 12, 125601 (December 2008). https://doi.org/10.1117/1.3050357

Abstract

A collimated heterodyne light enters a modified Linnik microscope, and the full-field interference signals are taken by a fast CMOS camera. The sampling intensities recorded at each pixel are fitted to derive a sinusoidal signal, and its phase can be obtained. Next, the 2-D phase unwrapping technique is applied to derive the 2-D phase distribution. Then, Ingelstam's formula is used to calculate the height distribution. Last, the height distribution is filtered with the Gaussian filter, the roughness topography and its average roughness can be obtained and its validity is demonstrated.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Yen-Liang Chen, Zhi-Cheng Jian, Hung-Chih Hsieh, Wang-Tsung Wu, and Der-Chin Su "Nano-roughness measurements with a modified Linnik microscope and the uses of full-field heterodyne interferometry," Optical Engineering 47(12), 125601 (1 December 2008). https://doi.org/10.1117/1.3050357

Published: 1 December 2008

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