Scattering light measurement of optical surfaces using a new dynamic angle limited integrated scattering method

Gilberto Gomez-Rosas; Jesus Villa; Francisco J. Casillas; Miguel Mora-González; Francisco G. Peña-Lecona; Jesús Muñoz Maciel

doi:10.1117/1.3430630

1 May 2010 Scattering light measurement of optical surfaces using a new dynamic angle limited integrated scattering method

Gilberto Gomez-Rosas, Jesus Villa, Francisco J. Casillas, Miguel Mora-González, Francisco G. Peña-Lecona, Jesús Muñoz Maciel

Author Affiliations +

Optical Engineering, Vol. 49, Issue 5, 053607 (May 2010). https://doi.org/10.1117/1.3430630

Abstract

The dynamic angle limited integrated scattering (DALIS) method has been developed to examine optically smooth reflective surfaces with well-defined form. The DALIS system shows advantages over the conventional angle-resolved scattering. We propose a new configuration and results in the DALIS method by using a spherical mirror as a collecting element of the scattered light from the surface of a sample under test. Furthermore, the proposed method improves the detection of the scattered light and is suitable to be applied in workshop inspection during optical polishing processes.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Gilberto Gomez-Rosas, Jesus Villa, Francisco J. Casillas, Miguel Mora-González, Francisco G. Peña-Lecona, and Jesús Muñoz Maciel "Scattering light measurement of optical surfaces using a new dynamic angle limited integrated scattering method," Optical Engineering 49(5), 053607 (1 May 2010). https://doi.org/10.1117/1.3430630

Published: 1 May 2010

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