Design and fabrication of a pyramid wavefront sensor

Aina Wang; Jun Yao; Dongmei Cai; Hao Ren

doi:10.1117/1.3461956

1 July 2010 Design and fabrication of a pyramid wavefront sensor

Aina Wang, Jun Yao, Dongmei Cai, Hao Ren

Author Affiliations +

Optical Engineering, Vol. 49, Issue 7, 073401 (July 2010). https://doi.org/10.1117/1.3461956

Abstract

A new pyramid wavefront sensor (PWFS), which utilizes a reflective pyramid mirror instead of a refractive pyramid prism at the focus of a telescope, is presented. As a key optical component in this PWFS, the pyramid mirror requires accurate microfabrication for excellent quality of the tip, the turned edges, and the surfaces. The moving mask lithography process is proposed for its economic, simple, and precise control to make the cross-sectional shape of the structure. The completed pyramid mirror has a square base of 1-mm length and four side facets inclined to the base at 3.7 deg. The sizes of the pyramid tip and turned edges are both about 6 µm, which show excellent aspects of sharpening-tip and knife-edges. The root mean square of four facets is approximately 70 nm, and the maximum profile deviation is 0.2 µm.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Aina Wang, Jun Yao, Dongmei Cai, and Hao Ren "Design and fabrication of a pyramid wavefront sensor," Optical Engineering 49(7), 073401 (1 July 2010). https://doi.org/10.1117/1.3461956

Published: 1 July 2010

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