Studies of matrix angle meters with a scale diameter of 5 and 23 mm have been carried out. The objective of the research was to assess the possibility of achieving the predicted meteorological parameters at the level of hundredths of an arc second for angle measurements and several nanometers for linear. To do this, work was carried out to stabilize the meters using a heat sink and thermal protection. Angular measurements were carried out on the basis of a goniometer rotary platform with an angle sensor LIR. Linear measurements were carried out on a two-channel stand with two identical matrix displacement meters. In both experiments, 1.3 Megapixel CMOS digital cameras were used as an image analyzer. It is concluded that the random error of the studied matrix meters does not exceed 0.05 arc-sec for angular measurements and 15 nm for measuring displacements.
Recently the authors proposed a new angle measurement technology based on the use of the two-dimensional scales. The rotation angle measurement is based on measuring the rotation of the pattern image on the sensor of a digital camera. The report presents the results of generalization of the developed earlier technology of angular measurements using a two-dimensional scale to measurements of linear displacements. It is shown that using a simple optical-digital system with a physical resolution, for example, of the order of several micrometers, it is possible to measure angles with an error of one thousandth of an arc second and linear displacements with an error of a fraction of a nanometer.
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