Mr. Alex Roqué-Velasco Profile

Alex Roqué-Velasco

at Wooptix

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Author

Publications (8)

Proceedings Article | 27 April 2023 Poster + Paper

New metrology technique for measuring the free shape of a patterned 300mm wafer held vertically

Juan Trujillo-Sevilla, Óscar Casanova-González, Alex Roqué-Velasco, Miguel Jesús Sicilia, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 12496, 124963G (2023) https://doi.org/10.1117/12.2661903

KEYWORDS: Semiconducting wafers, Silicon, Reflection, Wavefronts, Data acquisition, Cameras, Wafer-level optics, Image sensors, Phase imaging, Metrology

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Proceedings Article | 8 March 2023 Presentation + Paper

New wafer shape measurement technique for 300mm blank vertically held silicon wafer

Juan Trujillo-Sevilla, Óscar Casanova-González, Alex Roqué-Velasco, Javier González Pardo, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 12428, 124280U (2023) https://doi.org/10.1117/12.2651981

KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Reflection, Data acquisition, Collimation, Camera shutters, Overlay metrology, Gaussian filters, Cameras

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Proceedings Article | 7 December 2022 Poster + Paper

New wavefront phase sensor used for 3D shape measurements of silicon wafers

Juan Trujillo-Sevilla, Alex Roqué-Velasco, Miguel Jesús Sicilia, Óscar Casanova-González, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 12274, 122741F (2022) https://doi.org/10.1117/12.2645969

KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Cameras, Sensors, Reflectivity, 3D metrology, Wafer-level optics, Phase imaging, Image sensors

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Proceedings Article | 1 December 2022 Presentation + Paper

New wave front phase sensor used for 3D shape measurements of patterned silicon wafers

Juan Trujillo-Sevilla, Óscar Casanova-González, Alex Roqué-Velasco, Miguel Jesús Sicilia, Javier González Pardo, José Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 12292, 122920P (2022) https://doi.org/10.1117/12.2642287

KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Metals, Data acquisition, Image sensors, Reflectivity, Surface finishing, Interferometry, Beam splitters

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Proceedings Article | 3 October 2022 Presentation + Paper

Wave front phase imaging for silicon wafer metrology

Juan Trujillo-Sevilla, Alex Roqué-Velasco, Miguel Jesús Sicilia, Óscar Casanova-González, José Manuel Rodríguez-Ramos, Jan Gaudestad

Proceedings Volume 12216, 1221605 (2022) https://doi.org/10.1117/12.2632499

KEYWORDS: Semiconducting wafers, Silicon, Wavefronts, Cameras, Reflectivity, Phase imaging, Metrology, Image sensors, Data acquisition, Wafer-level optics

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Proceedings Article | 5 March 2022 Presentation + Paper

New high repeatability wafer geometry measurement technique for full 200mm and 300mm blank wafers

Juan Trujillo-Sevilla, Álvaro Pérez-García, Óscar Casanova-González, Miriam Velasco-Ocaña, Sabato Ceruso, Ricardo Oliva-García, Óscar Gómez-Cárdenes, Javier Martín-Hernández, Alex Roqué-Velasco, José Manuel Rodríguez-Ramos, Jan Gaudestad

Proceedings Volume 12008, 120080A (2022) https://doi.org/10.1117/12.2607315

KEYWORDS: Semiconducting wafers, Photovoltaics, Silicon, Cameras, Data acquisition, Gaussian filters, Wavefronts, Lithography, Imaging systems

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Proceedings Article | 28 October 2021 Presentation + Paper

Stria measurement using wave front phase imaging on a transparent plate

Juan M. Trujillo-Sevilla, Oscar Casanova-González, Miriam Velasco-Ocaña, Sabato Ceruso, Ricardo Oliva-García, Óscar Gómez-Cárdenes, Javier Martín-Hernández, Alex Roqué-Velasco, Alvaro Pérez-García, José Manuel Rodríguez-Ramos, Jan Gaudestad

Proceedings Volume 11889, 118891I (2021) https://doi.org/10.1117/12.2605328

KEYWORDS: Wavefronts, Glasses, Phase imaging, Spatial frequencies, Refractive index, Manufacturing, Visualization, Reflectivity, Optical sensors, Light wave propagation

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Proceedings Article | 12 October 2021 Poster + Presentation + Paper

New metrology technique for measuring wafer geometry on a full 300mm silicon wafer

Juan Trujillo-Sevilla, Óscar Casanova-González, Miriam Velasco-Ocaña, Sabato Ceruso, Ricardo Oliva-García, Óscar Gómez-Cárdenes, Javier Martín-Hernández, Alex Roqué-Velasco, Álvaro Pérez-García, Jose Manuel Ramos-Rodríguez, Jan Gaudestad

Proceedings Volume 11854, 118541B (2021) https://doi.org/10.1117/12.2605516

KEYWORDS: Semiconducting wafers, Silicon, Photovoltaics, Gaussian filters, Data acquisition, Wavefronts, Metrology, Cameras, Overlay metrology, Image sensors

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Showing 5 of 8 publications

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