For laser beam control in different scientific and industrial tasks adaptive optics tools are widely exploited. Any adaptive optical system parameters are mainly determined by wavefront corrector properties such as stroke, operating speed, resolution of control elements, accuracy performances. Stack-array deformable mirror wavefront corrector made of multilayer piezoceramic combs is proposed as low-cost and reliable alternative to conventional ones. Such design allows to increase spatial resolution and first resonant frequency. Moreover, proposed deformable mirrors will be distinguished by high cost-effectiveness that is key parameter for this type of wavefront correctors.
The stacked-actuator deformable mirror with a high spatial resolution of the control elements was developed. The key advantage of such a mirror is its simplicity of design, thanks to the use of piezoceramic combs. Each comb consists of 5 piezo actuators arranged in a row. By assembling such combs on a piezoceramic base, it is possible to obtain the desired geometry of the control elements of the piezoactuator mirror. On an aperture of 50 * 50 mm, 100 actuators were placed in a rectangular configuration, on which a reflective substrate with a thickness of 1 mm was glued. A deformation of the mirror of 4.5 μm was obtained under the action of a control voltage of +300 V.
Stacked-array deformable mirror is one of the most popular tools for correction of wavefront aberrations. We manufactured the stacked-array deformable mirror with small diameter by using piezoceramic combs with few actuators on them. In this case the aperture of mirror will be equal to 30 mm. The stroke of such mirror would be about 5 microns. The thickness of the mirror substrate is 1 mm. Developed deformable mirrors will be suitable for fast adaptive optical systems for optical radiation transferring through turbulent atmosphere tasks.
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