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Allan Minns
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Publications (1)
Proceedings Article | 2 April 2014 Paper
New techniques in large scale metrology toolset data mining to accelerate integrated chip technology development and increase manufacturing efficiencies
Eric Solecky, Narender Rana, Allan Minns, Carol Gustafson, Patrick Lindo, Roger Cornell, Paul Llanos
Proceedings Volume 9050, 905006 (2014) https://doi.org/10.1117/12.2046274
KEYWORDS: Metrology, Data mining, Semiconducting wafers, Statistical analysis, Time metrology, Diagnostics, Critical dimension metrology, Data modeling, Manufacturing, Process control
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