Mr. Allen Park Profile

Allen Park

Marketing Director at KLA Corp

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Publications (3)

Proceedings Article | 11 December 2009 Paper

Systematic defect management by design aware inspection

Ellis Chang, Allen Park

Proceedings Volume 7520, 75201C (2009) https://doi.org/10.1117/12.836993

KEYWORDS: Inspection, Semiconducting wafers, Wafer inspection, Defect inspection, Signal processing, Optical proximity correction, System on a chip, Lithography, Semiconductors, Logic

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Proceedings Article | 4 March 2008 Paper

Effective learning and feedback to designers through design and wafer inspection integration

Crockett Huang, Hermes Liu, S. F. Tzou, Allen Park, Chris Young, Ellis Chang

Proceedings Volume 6925, 692506 (2008) https://doi.org/10.1117/12.772242

KEYWORDS: Semiconducting wafers, Data modeling, Inspection, Metrology, Optical proximity correction, Finite element methods, Wafer inspection, Model-based design, Design for manufacturing, Defect inspection

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Proceedings Article | 21 March 2007 Paper

Novel technique to separate systematic and random defects during 65nm and 45nm process development

J. H. Yeh, Allen Park

Proceedings Volume 6521, 652114 (2007) https://doi.org/10.1117/12.711512

KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Defect inspection, Inspection, Yield improvement, Defect detection, Classification systems, Metrology, Microelectronics, Neodymium

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