Dr. Barney M. Cohen Profile

Dr. Barney M. Cohen

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 28 May 2004 Paper

Reduction of across-wafer CDU via constrained optimization of a multichannel PEB plate controller based on in-situ measurements of thermal time constants

Jason Tiffany, Barney Cohen

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.534267

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Sensors, Temperature metrology, Time metrology, Photoresist processing, Process control, Data modeling, Thermal modeling, Infrared sensors

Read Abstract +

Proceedings Article | 2 June 2003 Paper

New sensing wafer technique for artifact-free transient temperature measurements in PEB processes

Mei Sun, Barney Cohen, Farhat Quli, Wayne Renken

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.485039

KEYWORDS: Semiconducting wafers, Temperature metrology, Sensors, Electronics, Silicon, Deep ultraviolet, Platinum, Time metrology, Calibration, Resistance

Read Abstract +

Proceedings Article | 16 July 2002 Paper

Dynamic in-situ temperature profile monitoring of a deep-UV post-exposure-bake process

Barney Cohen, Wayne Renken, Paul Miller

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473441

KEYWORDS: Semiconducting wafers, Sensors, Temperature metrology, Deep ultraviolet, Convection, Silicon, Calibration, Critical dimension metrology, Platinum, Wafer testing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years