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Bas van Meerten
at ASML Netherlands B.V.
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Publications (2)
Proceedings Article | 13 November 2024 Presentation
High-resolution lithography: latest generation in EUV lithograph with 0.55 NA
Aysegul Cumurcu Gysen, Cheuk-Wah Man, Bas van Meerten, Hilbert van Loo, Eelco van Setten, Stefan Smith-Meerman, Gokay Yegen, Diederik de Bruin, Jan van Schoot, Rudy Peeters, Kaustuve Bhattacharyya, Greet Storms, Peter Vanoppen
Proceedings Volume PC13215, PC1321505 (2024) https://doi.org/10.1117/12.3036955
KEYWORDS: Extreme ultraviolet, Lithography, Metals, Extreme ultraviolet lithography, Design, Chip manufacturing, Overlay metrology, Optical lithography
SPIE Journal Paper | 8 October 2024
Fast simulation of the aerial image of 1D rotated features in an anamorphic system
JM3, Vol. 24, Issue 01, 011003, (October 2024) https://doi.org/10.1117/12.10.1117/1.JMM.24.1.011003
KEYWORDS: Polarization, Reticles, Semiconducting wafers, Light sources and illumination, Interpolation, Computation time, Diffraction, Vibration, Matrices, Device simulation
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