Mr. Benoit Barthod Profile

Benoit Barthod

EUV Project Manager at Alcatel Vacuum Technology

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Publications (2)

Proceedings Article | 6 May 2005 Paper

Laser and optical developments of a modular laser-plasma source for EUV lithography

G. Cheymol, Ph. Cormont, D. Farcage, A. Montmerle-Bonnefois, P.-Y. Thro, J.-M. Weulersse, M. Schmidt, O. Sublemontier, B. Barthod, I. Gaurand, J. Skrzypczak

Proceedings Volume 5751, (2005) https://doi.org/10.1117/12.593285

KEYWORDS: Extreme ultraviolet, Laser development, Mirrors, Plasma, Control systems, Oscillators, Monochromatic aberrations, Laser optics, Laser systems engineering, EUV optics

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Proceedings Article | 13 September 2002 Paper

PREUVE and the EXULITE project: modular laser-produced plasma EUV source

Tiberio Ceccotti, F. Chichmanian, D. Descamps, P. Haltebourg, Jean-Francois Hergott, S. Hulin, Didier Normand, Marc Segers, Olivier Sublemontier, Martin Schmidt, Philippe Cormont, M. Neu, Pierre-Yves Thro, Jean-Marc Weulersse, B. Barthod, R. Bernard, E. Veran, Jean-Marie Barbiche, Ph. D'Aux, E. Marquis

Proceedings Volume 4760, (2002) https://doi.org/10.1117/12.482115

KEYWORDS: Extreme ultraviolet, Xenon, Plasma, Extreme ultraviolet lithography, High power lasers, Laser development, Prototyping, Lithography, Laser systems engineering, Laser applications

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