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Botong Zhao
at East China Normal Univ
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Publications (2)
Proceedings Article | 10 December 2024 Paper
Integrated circuit defect classification based on multi-layer attention mechanisms
Proceedings Volume 13423, 1342319 (2024) https://doi.org/10.1117/12.3053071
KEYWORDS: Object detection, Defect detection, Integrated circuits, Feature extraction, Education and training, Performance modeling, Manufacturing, Detection and tracking algorithms
Proceedings Article | 10 December 2024 Paper
Machine learning based on using layout to generate reference SEM images for defect inspection
Xintong Zhao, Botong Zhao, Jiwei Shen, Hu Lu, Pengjie Lou, Kan Zhou, Wenzhan Zhou
Proceedings Volume 13423, 1342311 (2024) https://doi.org/10.1117/12.3052994
KEYWORDS: Defect inspection, Machine learning
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