Dr. Boy van Minderhout Profile

Dr. Boy van Minderhout

at Technische Univ Eindhoven

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Publications (2)

Proceedings Article | 22 February 2021 Poster + Paper

Plasma assisted particle contamination control: plasma charging dependence on particle morphology

J. C. A. van Huijstee, B. van Minderhout, R. M. H. Rompelberg, P. Blom, T. Peijnenburg, J. Beckers

Proceedings Volume 11611, 116113A (2021) https://doi.org/10.1117/12.2584607

KEYWORDS: Plasma, Particles, Contamination control, Particle contamination, Semiconductors, Extreme ultraviolet lithography, Contamination, Spherical lenses, Scanners, Robotics

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Proceedings Article | 23 March 2020 Paper

Particle contamination control by application of plasma

Job Beckers, Boy van Minderhout, Paul Blom, Gerrit Kroesen, Ton Peijnenburg

Proceedings Volume 11323, 113232L (2020) https://doi.org/10.1117/12.2560192

KEYWORDS: Particles, Plasma, Contamination control, Extreme ultraviolet, Extreme ultraviolet lithography, Contamination, Scanners, Particle contamination, Electrons, Electrodes

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